All liquids except those corrosive to stainless steel(ex. HCl, HF)
Setting Temperature
By vaporization conditions(Control Valve : Max 140 ˚C Vaporizer : Max 200 ˚C)
Leak Integrity
≤ 1 × 10-8 Pa·m3 /s (He)
Internal leak standard
≤ 1 × 10-6 Pa·m3 /s (He)
Wetted parts
SUS316L , PFA
Temperature Sensor
Thermocouple type K (CA)
Pressure Resistance
1MPa (G)
Standard Fitting
Liquid inlet: 1/8 VCR type Male Carrier gas inlet: 1/4 VCR type Female Gas outlet: 1/2 VCR type Male
Operating Temperature
15 - 50 ˚C
Option
Air valve(Internal leak standard: ≤ 1×10-9 Pa · m3 / s(He) )
scrollable
The generated flow rate may differ depending on the liquid material, amount of generation, generation conditions, etc. We will recommend the model most suited to your needs upon consultation.
The vaporizer has a heater, temperature sensor, and switch inside of it. Please contact us for more details on their specifications.
400-995-8107
