Model

VC-1420

Flow rate generated*1 (During TEOS generation)

Max. 5.0 CCM conversion (liquid phase conversion)

Liquids supported

 TEOS, P(OCH3)3, C6F6

Temperature rise

 Max. 150°C

Pressure generated*1

 Reduced pressure

External leak integrity

 1.0x10-8Pa·m3/s

Internal Leak Integrity

 1.0x10-6Pa·m3/s

Wetted mateliar

316L Stainless Steel ( polished surface )

Internal heater volume

 AC 100V to 120V 70W(35Wx2)

Temperature sensor used

Thermocouple K type (CA)

Pressure Resistance

 1.0MPa（G）

 Standard Fitting

 Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female

*1 Varies depending on the type of liquid.

*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa).