Model
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LU-A1000 series
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Liquids supported
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TEOS, TMOB, TMOP, TEOP, BTBAS
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Supply method
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Pressure movement from He gas
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Gas supply pressure
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For pressure movement: 0.3 to 0.6 MPa (G); For purge: 0.3 to 0.6 MPa (G), OP N2 0.6 to 0.7 MPa (G)
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Tank
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Maximum 5-gallon container can be attached (outside of production range)
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Operation
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Automatic supply/stop using external signal from supply system
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Operation area display details
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Pressure error display; When an alarm is triggered: Display hold function (manual reset); Liquid level display; Sequence, etc.
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Gas connection
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Refer to basic flow
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Power source
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AC 100 to 240 V, 50/60 Hz, 300 VA
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Electricity connection
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AC 100 to 240 V breaker connection, signal receptacle
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External dimensions
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See external dimensions diagram
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* Please make decisions regarding the specifications above after meeting with STEC.
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