LSC 系列紧凑型加热汽化系统
HORIBA的加热汽化系统为满足目前高科技工业的需求而开发。LSC 系列紧凑型加热汽化系统可在无需载气的情况下进行稳定的材料汽化，例如 TEOS（流量 600 SCCM）和 H2O（流量 2 SLM）。为方便操作，所有设备维护都可以在设备前端进行。
特征：
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大流量气化
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LSC-A100 提供 TEOS 600SCCM 和 H2O 2SLM 等材料的稳定气化
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所有设备维护都可以在设备前端进行
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可选掌上型 PDA 用于监控 LSC 的运行状态，并记录和分析运行日志
技术参数：
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Flow rate generated
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H2O 2SLM, TEOS 600 SCCM (Max.)
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Operating pressure
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Max. 1.33kPa
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Source tank volume
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2.7L
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Heat regulation method
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PID control by the heat regulator
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Liquid surface detection method
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Floating switch
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Internal mass flow controller
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SEC-8400 series
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Air pressure valve
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Bellows type
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Materials in liquid connection and gas contact area
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SUS316L, PFA
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Operating Temperature
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20 to 35°C
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External input
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Air pressure valve open/close, mass flow controller flow rate setting signal (0 to 5 V DC/0 to 100% F.S.), emergency stop signal, auto zero signal (option)
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External output
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Temperature alarm, liquid level H.H. alarm, liquid level signal (H, M, L), READY signal, mass flow controller flow rate output signal ((0 to 5 V DC/0 to 100% F.S.), thermoregulated bath internal fan stop alarm, valve voltage monitor (option)
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Power source
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AC 100 V, single phase 50/60 Hz, 1.5 kVA
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Other
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Auto-recharge system: Can be connected to LU series.
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* The flow rate control range varies with the type of liquid.
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* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
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外形尺寸：
400-995-8107
