PV-1000 Flow Range 1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv) Flow Control Range 2 -100% F.S. Valve Type normally open / close Input Signal 0 - 5VDC Responce less than 0.5 sec. Operating Temperature 0 - 50 °C Operating Diffential Pressure MAX. 300 kPa(a)(max,42psi) Pressure Resistance 1MPa Leak Integrity 5×10-12Pa•m3(He) scrollable PV-2000 Flow Range 10/20 LM Flow Control Range 2 -100% F.S. Valve Type normally open / close Input Signal 0 - 5VDC Responce less than 0.5 sec. Operating Temperature 0 - 50 °C Operating Diffential Pressure MAX. 300 kPa(a)(max,42psi) Pressure Resistance 1MPa Leak Integrity 5×10-12Pa•m3(He) scrollable 外形尺寸