Model
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DZ-114S
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Specification
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H
|
M
|
L
|
Full-scale flow rate (N2 conversion flow rate)
|
80 SCCM ~ 2.9 SLM
|
53 SCCM ~ 1.7 SLM
|
11 SCCM ~ 450 SCCM
|
Operating inlet pressure
|
370 ~ 900 kPa (A)
|
240 ~ 369 kPa (A)
|
110 ~ 239 kPa (A)
|
Operating differential pressure
|
> 350 kPa (D)
|
> 240 kPa (D)
|
> 110kPa (D)
|
Operating downstream pressure
|
≦ 13.3 kPa (A)
|
≦ 53.3 kPa (A)
|
≦ 13.3 kPa (A)
|
≦ 53.3 kPa (A)
|
≦ 13.3 kPa (A)
|
≦ 53.3 kPa (A))
|
Control range
|
1.0 ~ 100% F.S.
|
2.0 ~ 100% F.S.
|
2.0 ~ 100% F.S.
|
4.0 ~ 100% F.S.
|
5.0 ~ 100% F.S.
|
10 ~100% F.S.
|
Flow rate accuracy *1,*2
|
±0.5% S.P. (20 ~ 100% F.S.)
±0.1% F.S. (1 ~ 20% F.S.)
|
±0.5% S.P. (40 ~ 100% F.S.)
±0.2% F.S. (2 ~ 40% F.S.)
|
±1.0% F.S. (5 ~ 100% F.S.)
|
Offset / Span stability
|
±0.5% F.S. / year
|
±1% F.S. / year
|
±5% F.S. / year
|
Repeatability *1
|
±0.3% S.P.
(10 ~ 100% F.S.)
±0.03% F.S.
(1 ~ 10% F.S.)
|
±0.3% S.P.
(20 ~ 100% F.S.)
±0.06% F.S.
(2 ~ 20% F.S.)
|
±0.3% S.P.
(20 ~ 100% F.S.)
±0.06% F.S.
(2 ~ 20% F.S.)
|
±0.3% S.P.
(40 ~ 100% F.S.)
±0.12% F.S.
(4 ~ 40% F.S.)
|
±0.3% S.P.
(5 ~ 100% F.S.)
|
±0.3% S.P.
(10 ~ 100% F.S.)
|
Valve type
|
Normally Closed / Piezo Actuator
|
Step-up flow response time *3,*4
|
≦ 0.4 sec
|
Valve seat leak
|
< 0.5% F.S.
|
< 1.0% F.S
|
< 2.0% F.S.
|
Proof pressure
|
1.0 MPa (A)
|
Leak integrity
|
≦ 5.0 × 10-12 Pa m3/sec (He)
|
Wetted materials
|
SUS316L, Ni-Alloy, PFA, PCTFE
|
Operating temperature
|
15~45°C
|
Storage temperature
|
0~80°C
|
Mounting orientation
|
Attitude Insensitive
|
Temperature measurement accuracy
|
±1°C (15~45°C)
|
Warm-up operation time
|
> 30 minutes
|
Control interface *5
|
DeviceNetTM Protocol
|
Power supply
|
Master 1 PC, Slave (DZ-114S) 1PC : 8.2 VA (Slave 4.8 VA/PC) Up to 4 Slaves can be connected
|
*1 Flow rate accuracy and repeatability are guaranteed only for calibration gas and calibration full scale. (Outlet < 13.3 kPaA)
*2 Temperature range in which “accuracy” is guaranteed is in accordance with SEMI: E56-0309.
*3 Settling time is MFC output signal and N2 gas. Other detail definition follows settling time of SEMI Standard E17-1011 Section 4.1.4.
*4 Step up response time is confirmed in manufacturing calibration condition. Actual response time will be gas, flow and pressure dependent.
*5 Refer to the “DZ-114S DeviceNet™ Communication Manual” for details of communication.
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